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Modeling Of Structural And Environmental Effects On Microelectromechanical (Mems) Vibratory Gyroscopes

Modeling Of Structural And Environmental Effects On Microelectromechanical (Mems) Vibratory Gyroscopes

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Title: Modeling Of Structural And Environmental Effects On Microelectromechanical (Mems) Vibratory Gyroscopes
Author: Ting, D.S-K
Jalal Ahamed, Mohammed
Identifier: CSME098
Abstract: In this paper we investigate the effects of stiffness, damping and temperature on the performance of a MEMS vibratory gyroscope. The stiffness and damping parameters are chosen because they can be appropriately designed to synchronize the drive and sense mode resonance to enhance the sensitivity and stability of MEMS gyroscope. Our results show that increasing the drive axis stiffness by 50% reduces the sense mode amplitude by ~27% and augments the resonance frequency by ~21%. The stiffness and damping are mildly sensitive to typical variations in operating temperature. The stiffness increases by 1.25%, while the damping decreases by 3.81%, when the temperature is raised from 0C to 45C. Doubling the damping reduces the oscillation amplitude by 80%, but ~1% change in the frequency. The predicted effects of stiffness, damping and temperature can be utilized to design a gyroscope for the desired operating condition.
Subject: Mechatronics
Robots and Control
MEMS gyroscope
Resonator
Spring Stiffness Coefficient
Damping Coefficient
Temperature
Coriolis
Type: Article
Rights: The copyright for the paper content remains with the author.
URI: http://hdl.handle.net/10315/35238
http://dx.doi.org/10.25071/10315/35238
Published: CSME-SCGM
ISSN: 978-1-77355-023-7
Date: 2018-05

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